Focussed ion beam lithography using a MeV proton beam microprobe for microoptics fabrication Conference Proceedings uri icon

Overview

Authors

  • Authorship

  • Editor

    • WILLIAMS JS
    • ELLIMAN RG
    • RIDGWAY MC

Time

Date/time value

  • 1996

Additional Document Info

Parent Title

  • 9th International Conference on Ion Beam Modification of Materials (IBMM 95)
  • ION BEAM MODIFICATION OF MATERIALS

Publisher

  • publisher