Non-destructive film thickness measurement using atomic force microscopy at ultrasonic frequencies Conference Proceedings uri icon

Overview

Authors

  • Authorship

  • Editor

    • ALJUMAILY GA
    • DUPARRE A
    • SINGH B

Time

Date/time value

  • 2000

Identity

Digital Object Identifier (DOI)

  • 10.1117/12.405835

Additional Document Info

Parent Title

  • Conference on Optical Metrology Roadmap for the Semiconductor, Optical, and Data Storage Industries
  • OPTICAL METROLOGY ROADMAP FOR THE SEMICONDUCTOR, OPTICAL, AND DATA STORAGE INDUSTRIES

Volume

  • 4099

Publisher

  • SPIE - The International Society for Optical Engineering