Micromachined silicon nitride solid immersion lenses Conference Proceedings uri icon

Overview

Time

Date/time value

  • 2000

Identity

Digital Object Identifier (DOI)

  • 10.1109/OMEMS.2000.879660

Additional Document Info

Parent Title

  • 2000 IEEE/LEOS INTERNATIONAL CONFERENCE ON OPTICAL MEMS
  • IEEE/LEOS International Conference on Optical MEMS

Publisher

  • IEEE