Near-field photolithography with a solid immersion lens Journal Articles uri icon

Overview

Authors

  • Authorship

Published in

  • Applied Physics Letters

Time

Date/time value

  • 1999

Identity

Digital Object Identifier (DOI)

  • 10.1063/1.123168

Additional Document Info

Parent Title

  • APPLIED PHYSICS LETTERS

Volume

  • 74

Issue

  • 4

Publisher

  • American Institute of Physics