Self-aligned process for forming microlenses at the tips of vertical silicon nanowires by atomic layer deposition Journal Articles Refereed uri icon

Overview

Published in

  • Journal of Vacuum Science and Technology - Part A

Time

Date/time value

  • 2015

Identity

Digital Object Identifier (DOI)

  • 10.1116/1.4897221

Additional Document Info

Parent Title

  • JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A

Volume

  • 33

Issue

  • 1

Number

  • ARTN 01A109

Publisher

  • American Institute of Physics