Ion implantation through thin silicon dioxide layers for Si-based solid-state quantum computer device development Conference Proceedings uri icon

Overview

Published in

  • Materials Research Society Symposium Proceedings

Time

Date/time value

  • 2008

Identity

International Standard Book Number (ISBN) 13

  • 9781605608556

Additional Document Info

Parent Title

  • Materials Research Society Symposium Proceedings

Volume

  • 1074

Publisher

  • Materials Research Society