Ion-implantation and analysis for doped silicon slot waveguides Conference Proceedings uri icon

Overview

Published in

  • Conference on Optoelectronic and Microelectronic Materials and Devices. Proceedings

Time

Date/time value

  • 2012

Additional Document Info

Parent Title

  • 2012 CONFERENCE ON OPTOELECTRONIC AND MICROELECTRONIC MATERIALS AND DEVICES (COMMAD 2012)
  • Conference on Optoelectronic and Microelectronic Materials and Devices (COMMAD)

Publisher

  • Institute of Electrical and Electronics Engineers