2 MeV He microbeam damage in Si and GaAs Journal Articles uri icon

Overview

Published in

  • Nuclear Instruments & Methods in Physics Research. Section B: Beam Interactions with Materials and Atoms

Time

Date/time value

  • 1991

Identity

Digital Object Identifier (DOI)

  • 10.1016/0168-583X(91)95513-D

Additional Document Info

Parent Title

  • Nuclear Inst. and Methods in Physics Research, B

Volume

  • 54

Issue

  • 1-3

Publisher

  • Elsevier Science