MICROBEAM IMAGING AT MICRON AND SUBMICRON RESOLUTION Journal Articles uri icon

Overview

Published in

  • Nuclear Instruments & Methods in Physics Research. Section B: Beam Interactions with Materials and Atoms

Time

Date/time value

  • 1986

Identity

Digital Object Identifier (DOI)

  • 10.1016/0168-583X(86)90390-3

Additional Document Info

Parent Title

  • NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS

Volume

  • 15

Issue

  • 1-6

Publisher

  • Elsevier Science