Boron Enhanced H Diffusion in Amorphous Si Formed by Ion Implantation Conference Proceedings uri icon

Overview

Published in

  • Materials Research Society Symposium Proceedings

Time

Date/time value

  • 2008

Identity

International Standard Book Number (ISBN) 13

  • 978-1-60511-040-0

Additional Document Info

Parent Title

  • DOPING ENGINEERING FOR FRONT-END PROCESSING
  • Symposium on Doping Engineering for Front-End Processing held at the 2008 MRS Spring Meeting

Volume

  • 1070

Publisher

  • Materials Research Society