Deep level transient spectroscopy study of heavy ion implantation induced defects in silicon Journal Articles uri icon

Overview

Published in

  • Journal of Applied Physics

Time

Date/time value

  • 2018

Identity

Digital Object Identifier (DOI)

  • 10.1063/1.5047534

Additional Document Info

Parent Title

  • JOURNAL OF APPLIED PHYSICS

Volume

  • 124

Issue

  • 12

Number

  • ARTN 125701

Publisher

  • American Institute of Physics