Thermal simulation of surface micromachined polysilicon hot plates of low power consumption Conference Proceedings uri icon

Overview

Authors

  • Authorship

    • DUMITRESCU M
    • COBIANU C
    • LUNGU D
    • DASCALU D
    • PASCU A
    • PROF Spas Kolev
    • VAN DEN BERG A

Time

Date/time value

  • 1998

Additional Document Info

Parent Title

  • 1998 International Semiconductor Conference (CAS 98)
  • CAS'98 PROCEEDINGS - 1998 INTERNATIONAL SEMICONDUCTOR CONFERENCE, 21ST EDITION, VOLS 1 AND 2

Volume

  • 1

Publisher

  • IEEE