Thermal simulation of surface micromachined polysilicon hot plates of low power consumption Journal Articles uri icon

Overview

Authors

  • Authorship

    • DUMITRESCU M
    • COBIANU C
    • LUNGU D
    • DASCALU D
    • PASCU A
    • PROF Spas Kolev
    • VAN DEN BERG A

Published in

  • Sensors and Actuators A: Physical

Time

Date/time value

  • 1999

Identity

Digital Object Identifier (DOI)

  • 10.1016/S0924-4247(99)00042-4

Additional Document Info

Parent Title

  • Sensors and Actuators, A: Physical

Volume

  • 76

Issue

  • 1-3

Publisher

  • Elsevier