Hydrogen diffusion and segregation during solid phase epitaxial regrowth of preamorphized Si Journal Articles Refereed uri icon

Overview

Published in

  • Journal of Applied Physics

Time

Date/time value

  • 2016

Identity

Digital Object Identifier (DOI)

  • 10.1063/1.4944321

Additional Document Info

Parent Title

  • JOURNAL OF APPLIED PHYSICS

Volume

  • 119

Issue

  • 11

Number

  • ARTN 115103

Publisher

  • American Institute of Physics