Surface morphological structures in ultra-high-dose self-implanted silicon Journal Articles uri icon

Overview

Published in

  • Applied Physics Letters

Time

Date/time value

  • 1998

Identity

Digital Object Identifier (DOI)

  • 10.1063/1.122290

Additional Document Info

Parent Title

  • Applied Physics Letters

Volume

  • 73

Issue

  • 13

Publisher

  • American Institute of Physics