The kinetics of dopant-enhanced solid phase epitaxy in H-free amorphous silicon layers Journal Articles uri icon

Overview

Published in

  • Nuclear Instruments & Methods in Physics Research. Section B: Beam Interactions with Materials and Atoms

Time

Date/time value

  • 1999

Additional Document Info

Parent Title

  • Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms

Volume

  • 148

Issue

  • 1-4

Publisher

  • Elsevier Science