Comparison between implanted boron and phosphorus in silicon wafers. Conference Proceedings uri icon

Overview

Published in

  • Conference on Optoelectronic and Microelectronic Materials and Devices. Proceedings

Time

Date/time value

  • 2010

Identity

Digital Object Identifier (DOI)

  • 10.1109/COMMAD.2010.5699752

International Standard Book Number (ISBN) 13

  • 9781424473328

Additional Document Info

Parent Title

  • Conference on Optoelectronic and Microelectronic Materials and Devices (COMMAD)
  • PROCEEDINGS OF 2010 CONFERENCE ON OPTOELECTRONIC AND MICROELECTRONIC MATERIALS AND DEVICES (COMMAND 2010)

Publisher

  • Institute of Electrical and Electronics Engineers