The effect of potassium on the rate of solid phase epitaxy in silicon Journal Articles Refereed uri icon

Overview

Published in

  • Nuclear Instruments & Methods in Physics Research. Section B: Beam Interactions with Materials and Atoms

Time

Date/time value

  • 2002

Identity

Digital Object Identifier (DOI)

  • 10.1016/S0168-583X(01)01178-8

Additional Document Info

Parent Title

  • Nuclear Instruments & Methods in Physics Research. Section B: Beam Interactions with Materials and Atoms

Volume

  • 190

Publisher

  • Elsevier Science