Angular dependence of defect formation in H-implanted silicon studied using deep level transient spectroscopy Journal Articles Refereed uri icon

Overview

Published in

  • Nuclear Instruments & Methods in Physics Research. Section B: Beam Interactions with Materials and Atoms

Time

Date/time value

  • 2007

Identity

Digital Object Identifier (DOI)

  • 10.1016/j.nimb.2007.01.116

Additional Document Info

Parent Title

  • Nuclear Instruments & Methods in Physics Research. Section B: Beam Interactions with Materials and Atoms

Volume

  • 257

Publisher

  • Elsevier Science