Defect formation due to the crystallization of deep amorphous volumes formed in silicon by mega electron volt (MeV) ion implantation Journal Articles Refereed uri icon

Overview

Published in

  • Journal of Materials Research

Time

Date/time value

  • 2001

Additional Document Info

Parent Title

  • Journal of Materials Research

Volume

  • 16

Issue

  • 11

Publisher

  • Materials Research Society