Characterization of a large area scanning PECVD deposition system with small size RF electrodes Journal Articles Refereed uri icon

Overview

Authors

  • Authorship

    • YIN Y
    • GODFREY RB
    • HANG L
    • PROSCHEK M
    • MCKENZIE DR
    • BILEK MMM
    • ALLAN S
    • HAN J
    • DR Sergey Rubanov
    • LAUDER RDT

Published in

  • Thin Solid Films

Time

Date/time value

  • 2006

Identity

Digital Object Identifier (DOI)

  • 10.1016/j.tsf.2005.12.082

Additional Document Info

Parent Title

  • Thin Solid Films

Volume

  • 515

Publisher

  • Elsevier Science