Three-dimensional imaging of individual hafnium atoms inside a semicondutor device Journal Articles Refereed uri icon

Overview

Authors

  • Authorship

    • VAN BENTHEM K
    • LUCK JT
    • PENNYCOOK SJ
    • LUPINI AR
    • KIM M
    • BAIK HS
    • DOH S
    • LEE JH
    • OXLEY MP
    • FINDLAY SD
    • PROF Les J. Allen

Published in

  • Applied Physics Letters

Time

Date/time value

  • 2005

Identity

Digital Object Identifier (DOI)

  • 10.1063/1.1991989

Additional Document Info

Parent Title

  • Applied Physics Letters

Volume

  • 87

Number

  • 034104

Publisher

  • American Institute of Physics