Silicon photodetectors integrated with vertical silicon nitride waveguides as image sensor pixels: Fabrication and characterization Journal Articles Refereed uri icon

Overview

Published in

  • Journal of Vacuum Science and Technology. Part B. Microelectronics and Nanometer Structures

Time

Date/time value

  • 2014

Identity

Digital Object Identifier (DOI)

  • 10.1116/1.4868627

Additional Document Info

Parent Title

  • Journal of Vacuum Science and Technology. Part B. Microelectronics and Nanometer Structures

Volume

  • 32

Number

  • 031201

Publisher

  • American Institute of Physics