Fabrication techniques of high aspect ratio vertical lightpipes using a dielectric photomask Full Written Papers Refereed uri icon

Overview

Time

Date/time value

  • 2010

Identity

Digital Object Identifier (DOI)

  • 10.1117/12.840725

Additional Document Info

Parent Title

  • Advanced Fabrication Technologies for Micro/Nano Optics and Photonics III

Volume

  • 7591

Publisher

  • SPIE - The International Society for Optical Engineering