Fabrication of high-aspect-ratio lightpipes Journal Articles Refereed uri icon

Overview

Published in

  • Journal of Vacuum Science and Technology. Part B. Microelectronics and Nanometer Structures

Time

Date/time value

  • 2011

Identity

Digital Object Identifier (DOI)

  • 10.1116/1.3589809

Additional Document Info

Parent Title

  • Journal of Vacuum Science and Technology. Part B. Microelectronics and Nanometer Structures

Volume

  • 29

Issue

  • 3

Number

  • 031206

Publisher

  • American Institute of Physics