Micromachined silicon nitride solid immersion lens Journal Articles Refereed uri icon

Overview

Published in

  • IEEE Journal of Microelectromechanical Systems

Time

Date/time value

  • 2002

Identity

Digital Object Identifier (DOI)

  • 10.1109/JMEMS.2002.803282

Additional Document Info

Parent Title

  • IEEE Journal of Microelectromechanical Systems

Volume

  • 11

Issue

  • 5

Publisher

  • IEEE - Institute of Electrical and Electronic Engineers