Activation energy and blistering rate in hydrogen-implanted semiconductors Journal Articles Unrefereed uri icon

Overview

Published in

  • Materials Research Society Symposium Proceedings

Time

Date/time value

  • 2012

Identity

Digital Object Identifier (DOI)

  • 10.1557/opl.2012.677

Additional Document Info

Parent Title

  • Materials Research Society Symposium Proceedings

Volume

  • 1424

Publisher

  • Materials Research Society