Implantation angle dependent study of vacancy related defect profiles in ion implanted silicon Journal Articles Refereed uri icon

Overview

Published in

  • Physica B

Time

Date/time value

  • 2003

Identity

Digital Object Identifier (DOI)

  • 10.1016/j.physb.2003.09.150

Additional Document Info

Parent Title

  • Physica B

Volume

  • 340-342

Publisher

  • Elsevier Science