Ion-implantation and analysis for doped silicon slot waveguides Full Written Papers Refereed uri icon

Overview

Time

Date/time value

  • 2012

Identity

Digital Object Identifier (DOI)

  • 10.1051/epjconf/20123503002

Additional Document Info

Parent Title

  • EPJ Web of Conferences
  • Heavy Ion Accelerator Symposium on Fundamental and Applied Science 2012

Volume

  • 35

Publisher

  • EDP Sciences