Controlled deterministic implantation by nanostencil lithography at the limit of ion-aperture straggling Journal Articles Refereed uri icon

Overview

Published in

  • Nanotechnology

Time

Date/time value

  • 2013

Identity

Digital Object Identifier (DOI)

  • 10.1088/0957-4484/24/14/145304

Additional Document Info

Parent Title

  • Nanotechnology

Volume

  • 24

Issue

  • 14

Number

  • 145304

Publisher

  • IOP Publishing