Progress towards atom lithography on iron Journal Articles Refereed uri icon

Overview

Authors

  • Authorship

    • TE SLIGTE E
    • SMEETS B
    • BOSCH RCM
    • VAN DER STAM KMR
    • MAGUIRE LP
    • PROF Robert Scholten
    • BEIJERINCK HCW
    • VAN LEEUWEN KAH

Published in

  • Microelectronic Engineering

Time

Date/time value

  • 2003

Identity

Digital Object Identifier (DOI)

  • 10.1016/S0167-9317(03)00172-2

Additional Document Info

Parent Title

  • Microelectronic Engineering

Volume

  • 67-68

Publisher

  • Elsevier Science