Fabrication and characterization of PECVD silicon nitride for RF MEMS applications Journal Articles Refereed uri icon

Overview

Published in

  • Microsystem Technologies

Time

Date/time value

  • 2013

Identity

Digital Object Identifier (DOI)

  • 10.1007/s00542-012-1522-0

Additional Document Info

Parent Title

  • Microsystem Technologies

Volume

  • 19

Issue

  • 1

Publisher

  • Springer Verlag