Single-Ion Implantation for the Development of Si-Based MOSFET Devices with Quantum Functionalities Journal Articles Refereed uri icon

Overview

Published in

  • Advances in Materials Science and Engineering

Time

Date/time value

  • 2012

Identity

Digital Object Identifier (DOI)

  • 10.1155/2012/272694

Additional Document Info

Parent Title

  • Advances in Materials Science and Engineering

Volume

  • 2012

Number

  • 272694

Publisher

  • Hindawi Publishing Corp