Deep level transient spectroscopy study of defects at Si/SiO2 and Si/Si3N4 interfaces Full Written Papers Refereed uri icon

Overview

Time

Date/time value

  • 2010

Identity

International Standard Book Number (ISBN) 13

  • 978-1-4244-5262-0

Additional Document Info

Parent Title

  • ICONN 2010
  • Proceedings of the 2010 International Conference on Nanoscience and Nanotechnology

Publisher

  • IEEE - Institute of Electrical and Electronic Engineers