Deep level transient spectroscopy study of defects at Si/SiO2 and Si/Si3N4 interfaces Full Written Papers Refereed uri icon

Overview

Time

Date/time value

  • 2010

Identity

Digital Object Identifier (DOI)

  • 10.1109/ICONN.2010.6045257

International Standard Book Number (ISBN) 13

  • 9781424452620

Additional Document Info

Parent Title

  • ICONN 2010
  • ICONN 2010 - Proceedings of the 2010 International Conference on Nanoscience and Nanotechnology

Publisher

  • publisher