The crystallisation of deep amorphous wells in silicon produced by ion implantation Journal Articles Refereed uri icon

Overview

Published in

  • Nuclear Instruments & Methods in Physics Research. Section B: Beam Interactions with Materials and Atoms

Time

Date/time value

  • 2001

Additional Document Info

Parent Title

  • Nuclear Instruments & Methods in Physics Research. Section B: Beam Interactions with Materials and Atoms

Volume

  • 175-177

Publisher

  • Elsevier Science