Hydrogen refinement during solid phase epitaxy of buried amorphous silicon layers Journal Articles Refereed uri icon

Overview

Published in

  • Journal of Applied Physics

Time

Date/time value

  • 2010

Identity

Digital Object Identifier (DOI)

  • 10.1063/1.3465547

Additional Document Info

Parent Title

  • Journal of Applied Physics

Volume

  • 108

Number

  • 044901

Publisher

  • American Institute of Physics