A deep level transient spectroscopy study of vacancy-related defect profiles in channeled ion implanted silicon Full Written Papers Refereed uri icon

Overview

Time

Date/time value

  • 2002

Additional Document Info

Parent Title

  • 2002 Conference on Optoelectronic and Microelectronic Materials and Devices
  • COMMAD 2002 Proceedings

Publisher

  • Institute of Electrical and Electronics Engineers