An EPR study on the activation of low energy phosphorus ions implanted into silicon Full Written Papers Unrefereed uri icon

Overview

Time

Date/time value

  • 2007

Additional Document Info

Parent Title

  • 15th Australian Conference on Nuclear and Complementary Techniques ofAnalysis & 9th Vacuum Society ofAustralia Congress proceedings
  • AINSE 2007

Publisher

  • Australian Institute of Nuclear Science and Engineering