Production issues for high aspect ratio Lobster-eye optics using LIGA Journal Articles Refereed uri icon

Overview

Authors

  • Authorship

Published in

  • Microsystem Technologies

Time

Date/time value

  • 2002

Identity

Digital Object Identifier (DOI)

  • 10.1007/s00542-002-0196-4

Additional Document Info

Parent Title

  • 4th International Workshop on High Aspect Ratio Microstructure Technology (HARMST 2001)
  • MICROSYSTEM TECHNOLOGIES

Volume

  • 9

Issue

  • 1-2

Publisher

  • Springer Verlag