Extremely high aspect ratio alumina transmission nanomasks: their fabrication and characterization using electron microscopy Journal Articles Refereed uri icon

Overview

Published in

  • Nanotechnology

Time

Date/time value

  • 2009

Identity

Digital Object Identifier (DOI)

  • 10.1088/0957-4484/20/6/065706

Additional Document Info

Parent Title

  • Nanotechnology

Volume

  • 20

Number

  • 065706

Publisher

  • IOP Publishing