Ion implantation through thin silicon dioxide layers for Si-based solid-state quantum computer device development Full Written Papers Refereed uri icon

Overview

Time

Date/time value

  • 2008

Additional Document Info

Parent Title

  • Materials Research Society Symposium Proceedings
  • Symposium I - Synthesis and Metrology of Nanoscale Oxides and Thin Films

Volume

  • 1074

Publisher

  • Materials Research Society