Interface trap density reduction in thin silicon oxides using ion implantation Full Written Papers Unrefereed uri icon

Overview

Time

Date/time value

  • 2007

Additional Document Info

Parent Title

  • 15th Australian Conference on Nuclear and Complementary Techniques of Analysis & 9th Vacuum Society of Australia Congress
  • 15th Australian Conference on Nuclear and Complementary Techniques of Analysis & 9th Vacuum Society of Australia Congress Proceedings

Publisher

  • Australian Institute of Nuclear Science and Engineering