FUNDAMENTAL IMPLANTATION, EPITAXY AND DEFECT STUDIES IN SILICON TO SUPPORT ULTRA-SHALLOW JUNCTION FORMATION Contract uri icon

Overview

Grant awarded by

  • THE AUSTRALIAN NATIONAL UNIVERSITY

Sponsor award id

  • DP0663445

Awards

Contributor

  • A/PROF Jeffrey McCallum Investigator 2006 - 2009
  • GOSSMANN, DR HANS-JOACHIM Investigator 2006 - 2009
  • SIMPSON, DR PETER Investigator 2006 - 2009
  • WILLIAMS, PROF JAMES Investigator 2006 - 2009
  • WONG-LEUNG, DR YIN-YIN Investigator 2006 - 2009

Time

Date/time interval

  • 2006 - 2009

Other

Scheme

  • Discovery Projects